Nondestructive characterization of thin films using measured basis spectra and/or based on acquired spectrum
A Standard patent application filed on 23 December 2003 credited to Watson, David G.
;
Larson, Paul E.
;
Moulder, John F.
Details
Application number :
2003299965
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Nondestructive characterization of thin films using measured basis spectra and/or based on acquired spectrum
Inventor :
Watson, David G.
;
Larson, Paul E.
;
Moulder, John F.