Method and apparatus for overlay control using multiple targets
A Standard patent application filed on 06 November 2003 credited to Bode, Christopher A.
;
Edwards, Richard D.
;
Jones, Gary K.
Details
Application number :
2003291236
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method and apparatus for overlay control using multiple targets
Inventor :
Bode, Christopher A.
;
Edwards, Richard D.
;
Jones, Gary K.
Agent name :
Address for service :
Filing date :
06 November 2003
Associated companies :
Applicant name :
ADVANCED MICRO DEVICES, INC.
Applicant address :
One AMD Place, Mail Stop 68, P.O. Box 3453, Sunnyvale, CA 94088-3453