Sensor for monitoring material deposition and method of monitoring material deposition
A Standard patent application filed on 12 November 2003 credited to Liu, Chang
Details
Application number :
2003290759
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Sensor for monitoring material deposition and method of monitoring material deposition
Inventor :
Liu, Chang
Agent name :
Address for service :
Filing date :
12 November 2003
Associated companies :
Applicant name :
THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
Applicant address :
506 South Wright Street, 352 Henry Administration Building, Urbana, IL 61801