Method and device for pre-treating surfaces of substrates to be bonded
A Standard patent application filed on 04 December 2003 credited to Gabriel, Markus ; Ossmann, Christian

Details

Application number :

2003289959  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method and device for pre-treating surfaces of substrates to be bonded  

Inventor :

Gabriel, Markus ; Ossmann, Christian  

Agent name :

 

Address for service :

 

Filing date :

04 December 2003  

Associated companies :

 

Applicant name :

SUSS MIRCRO TEC LITHOGRAPHY GMBH  

Applicant address :

Schleissheimerstrasse 90, 85748 Garching  

Old name :

 

Original Source :

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