Apparatus and method for inhibiting decomposition of germane
A Standard patent application filed on 27 October 2003 credited to Sturm, Edward ; Wang, Luping ; Dietz, James

Details

Application number :

2003286671  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Apparatus and method for inhibiting decomposition of germane  

Inventor :

Sturm, Edward ; Wang, Luping ; Dietz, James  

Agent name :

 

Address for service :

 

Filing date :

27 October 2003  

Associated companies :

 

Applicant name :

ADVANCED TECHNOLOGY MATERIALS, INC.  

Applicant address :

7 Commerce Drive, Danbury, CT 06810  

Old name :

 

Original Source :

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