Method for fabrication of diffractive optical elements for maskless lithography

Application number :: 2003279127
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Method for fabrication of diffractive optical elements for maskless lithography
Inventor :: Gil, Dario ; Carter, David J. ; Menon, Rajesh ; Goodberlet, James G. ; Hastings, Jeffrey T. ; Smith, Henry I.
Agent name :
Address for service :
Filing date :: 02 October 2003
Associated companies :
Applicant name :: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
Applicant address :: 77 Massachusetts Avenue, Cambridge, MA 02139
Old name :
Original Source :: Go

Method for fabrication of diffractive optical elements for maskless lithography A Standard patent application filed on 02 October 2003 credited to Gil, Dario ; Carter, David J. ; Menon, Rajesh ; Goodberlet, James G. ; Hastings, Jeffrey T. ; Smith, Henry I.