Method of forming film on substrate

Application number :: 2003277601
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Method of forming film on substrate
Inventor :: Sakai, Shigeki
Agent name :
Address for service :
Filing date :: 07 November 2003
Associated companies :
Applicant name :: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
Applicant address :: 3-1, Kasumigaseki 1-chome, Chiyoda-ku, Tokyo 100-8921
Old name :
Original Source :: Go

Method of forming film on substrate A Standard patent application filed on 07 November 2003 credited to Sakai, Shigeki