Device for holding a beam splitter element
A Standard patent application filed on 07 October 2003 credited to Kohl, Alexander ; Schoeppach, Armin ; Gaber, Erwin ; Kaiser, Winfried ; Garreis, Reiner ; Gruner, Toralf ; Weber, Ulrich ; Holderer, Hubert

Details

Application number :

2003273950  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Device for holding a beam splitter element  

Inventor :

Kohl, Alexander ; Schoeppach, Armin ; Gaber, Erwin ; Kaiser, Winfried ; Garreis, Reiner ; Gruner, Toralf ; Weber, Ulrich ; Holderer, Hubert  

Agent name :

 

Address for service :

 

Filing date :

07 October 2003  

Associated companies :

 

Applicant name :

CARL ZEISS SMT AG  

Applicant address :

Carl-Zeiss-Strasse 22, 73447 Oberkochen  

Old name :

 

Original Source :

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