Method for forming thin film and apparatus therefor
A Standard patent application filed on 03 October 2003 credited to Ueda, Masashi
;
Takagi, Tomoko
;
Ito, Norikazu
Details
Application number :
2003271089
Application type :
Standard
Application status :
SEALED
Under opposition :
No
Proceeding type :
Invention title :
Method for forming thin film and apparatus therefor
Inventor :
Ueda, Masashi
;
Takagi, Tomoko
;
Ito, Norikazu
Agent name :
Spruson & Ferguson
Address for service :
Level 35 St Martins Tower 31 Market Street Sydney NSW 2000 Australia
Filing date :
03 October 2003
Associated companies :
Applicant name :
Ishikawajima-Harima Heavy Industries Co., Ltd.
Applicant address :
2-1, Otemachi 2-chome, Chiyoda-ku Tokyo 100-8182 Japan