Method of heating a substrate in a variable temperature process using a fixed temperature chuck
A Standard patent application filed on 10 September 2003 credited to Cox, Gerald

Details

Application number :
2003270613  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Method of heating a substrate in a variable temperature process using a fixed temperature chuck  
Inventor :
Cox, Gerald  
Agent name :
 
Address for service :
 
Filing date :
10 September 2003  
Associated companies :
 
Applicant name :
AXCELIS TECHNOLOGIES, INC.  
Applicant address :
55 Cherry Hill Dr., Beverly, MA 01915-1053  
Old name :
 
Original Source :
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Same Inventor