Neutral particle beam processing apparatus with enhanced conversion performance from plasma ions to neutral particles

Application number :: 2003269548
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Neutral particle beam processing apparatus with enhanced conversion performance from plasma ions to neutral particles
Inventor :: Yoo, Suk-Jae ; Lee, Bong-Ju
Agent name :
Address for service :
Filing date :: 15 October 2003
Associated companies :
Applicant name :: SEM TECHNOLOGY CO., LTD
Applicant address :: 5th Floor, Dongkoong Town Bldg. 91-2, Chongdam-dong, Kangnam-ku, Seoul 135-100
Old name :
Original Source :: Go

Neutral particle beam processing apparatus with enhanced conversion performance from plasma ions to neutral particles A Standard patent application filed on 15 October 2003 credited to Yoo, Suk-Jae ; Lee, Bong-Ju