Method of manufacturing a semiconductor device with field isolation regions consisting of grooves filled with isolating material
A Standard patent application filed on 30 September 2003 credited to Ravit, Claire
;
Rooyackers, Rita V. T.
;
Schmitz, Jurriaan
Details
Application number :
2003267709
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method of manufacturing a semiconductor device with field isolation regions consisting of grooves filled with isolating material
Inventor :
Ravit, Claire
;
Rooyackers, Rita V. T.
;
Schmitz, Jurriaan