Stray light suppression structures using a waveguide and angled, deep etched trenches filled with an absorbing material
A Standard patent application filed on 03 September 2003 credited to Kersten, Peter
;
Schreiber, Gerhard
Details
Application number :
2003265051
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Stray light suppression structures using a waveguide and angled, deep etched trenches filled with an absorbing material