A hybrid beam deposition system and methods for fabricating zno films, p-type zno films, and zno-based ii-vi compound semiconductor devices
A Standard patent application filed on 27 August 2003 credited to White, Henry W.
;
Ryu, Yungryel
;
Lee, Tae-Seok
Details
Application number :
2003262981
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
A hybrid beam deposition system and methods for fabricating zno films, p-type zno films, and zno-based ii-vi compound semiconductor devices