Advanced chemical mechanical polishing system with smart endpoint detection
A Standard patent application filed on 17 January 2003 credited to Frey, Bernard M. ; Mcgrath, Bret E. ; Basol, Bulent M. ; Young, Douglas ; Wang, Yuchun ; Talieh, Homayoun ; Desai, Mukesh ; Truong, Tuan ; Velazquez, Efrain

Details

Application number :

2003248673  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Advanced chemical mechanical polishing system with smart endpoint detection  

Inventor :

Frey, Bernard M. ; Mcgrath, Bret E. ; Basol, Bulent M. ; Young, Douglas ; Wang, Yuchun ; Talieh, Homayoun ; Desai, Mukesh ; Truong, Tuan ; Velazquez, Efrain  

Agent name :

 

Address for service :

 

Filing date :

17 January 2003  

Associated companies :

 

Applicant name :

NUTOOL, INC.  

Applicant address :

1655 McCandless Drive, Milpitas, CA 95035  

Old name :

 

Original Source :

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