Details
- Application number :
- 2003248065
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Method for processing soi substrate
- Inventor :
- Takahashi, Toshiaki
;
Arai, Kazuhisa
- Agent name :
-
- Address for service :
-
- Filing date :
- 14 July 2003
- Associated companies :
-
- Applicant name :
- DISCO CORPORATION
- Applicant address :
- 14-3, Higashi Kojiya 2-chome, Ota-ku, Tokyo 144-8650
- Old name :
-
- Original Source :
- Go