Direct, low frequency capacitance measurement for scanning capacitance microscopy
A Standard patent application filed on 02 June 2003 credited to Bhushan, Bharat ; Pelz, Jonathan P. ; Lee, David T.

Details

Application number :

2003247463  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Direct, low frequency capacitance measurement for scanning capacitance microscopy  

Inventor :

Bhushan, Bharat ; Pelz, Jonathan P. ; Lee, David T.  

Agent name :

 

Address for service :

 

Filing date :

02 June 2003  

Associated companies :

 

Applicant name :

THE OHIO STATE UNIVERSITY  

Applicant address :

1960 Kenny Road, Columbus, OH 43210-1063  

Old name :

 

Original Source :

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