Pattern detector and its using method, measuring method and apparatus, position measuring method, exposing method and device, and method for fabricating device
A Standard patent application filed on 26 June 2003 credited to Kanaya, Yuho
Details
Application number :
2003246197
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Pattern detector and its using method, measuring method and apparatus, position measuring method, exposing method and device, and method for fabricating device
Inventor :
Kanaya, Yuho
Agent name :
Address for service :
Filing date :
26 June 2003
Associated companies :
Applicant name :
NIKON CORPORATION
Applicant address :
2-3, Marunouchi 3-chome, Chiyoda-ku, Tokyo 100-8331