Single wafer fabrication of integrated micro-fluidic system
A Standard patent application filed on 16 May 2003 credited to Heng, Chew Kiat
;
Singh, Janak
;
Chen, Yu
;
Yan, Tie
;
Lim, Tit Meng
;
Zou, Quanbo
Details
Application number :
2003237767
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Single wafer fabrication of integrated micro-fluidic system