Polishing pad for electrochemical-mechanical polishing and methods to manufacture it
A Standard patent application filed on 22 May 2003 credited to Guo, George Xinsheng ; Basol, Bulent M.

Details

Application number :

2003233676  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Polishing pad for electrochemical-mechanical polishing and methods to manufacture it  

Inventor :

Guo, George Xinsheng ; Basol, Bulent M.  

Agent name :

 

Address for service :

 

Filing date :

22 May 2003  

Associated companies :

 

Applicant name :

NUTOOL, INC.  

Applicant address :

1655 McCandless Drive, Milpitas, CA 95035  

Old name :

 

Original Source :

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