Dual arm substrate transport apparatus
A Standard patent application filed on 28 May 2003 credited to Solomon, Todd ; Caveney, Robert T.

Details

Application number :

2003231869  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Dual arm substrate transport apparatus  

Inventor :

Solomon, Todd ; Caveney, Robert T.  

Agent name :

 

Address for service :

 

Filing date :

28 May 2003  

Associated companies :

 

Applicant name :

BROOKS AUTOMATION, INC.  

Applicant address :

15 Elizabeth Drive, Chelmsford, MA 01824  

Old name :

 

Original Source :

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