Ultra small thin windows in floating gate transistors defined by lost nitride spacers
A Standard patent application filed on 04 April 2003 credited to Renninger, Alan L.
;
Daemen, Eleonore
;
Lojek, Bohumil
Details
Application number :
2003230840
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Ultra small thin windows in floating gate transistors defined by lost nitride spacers
Inventor :
Renninger, Alan L.
;
Daemen, Eleonore
;
Lojek, Bohumil