Automatic gas control system for a gas discharge laser
A Standard patent application filed on 05 May 2003 credited to Ershov, Alexander I.
;
Wittak, Christian J.
;
Brown, Daniel J. W.
;
Trintchouk, Fedor
;
Fleurov, Vladimir B.
;
Morton, Richard G.
;
Hofmann, Thomas
;
Ishihara, Toshihiko
;
Rule, John A.
Details
Application number :
2003228848
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Automatic gas control system for a gas discharge laser
Inventor :
Ershov, Alexander I.
;
Wittak, Christian J.
;
Brown, Daniel J. W.
;
Trintchouk, Fedor
;
Fleurov, Vladimir B.
;
Morton, Richard G.
;
Hofmann, Thomas
;
Ishihara, Toshihiko
;
Rule, John A.
Agent name :
Address for service :
Filing date :
05 May 2003
Associated companies :
Applicant name :
CYMER, INC.
Applicant address :
Legal Dept., 17075 Thornmint Drive, San Diego, CA 92127