Method for forming underlying insulation film
A Standard patent application filed on 31 March 2003 credited to Nakamura, Genji ; Hasebe, Kazuhide ; Sasaki, Masaru ; Matsuyama, Seiji ; Tada, Yoshihide ; Nakajima, Shigeru ; Sugawara, Takuya ; Fujiwara, Tomonori ; Nakanishi, Toshio ; Ozaki, Shigenori

Details

Application number :

2003221055  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method for forming underlying insulation film  

Inventor :

Nakamura, Genji ; Hasebe, Kazuhide ; Sasaki, Masaru ; Matsuyama, Seiji ; Tada, Yoshihide ; Nakajima, Shigeru ; Sugawara, Takuya ; Fujiwara, Tomonori ; Nakanishi, Toshio ; Ozaki, Shigenori  

Agent name :

 

Address for service :

 

Filing date :

31 March 2003  

Associated companies :

 

Applicant name :

TOKYO ELECTRON LIMITED  

Applicant address :

3-6, Akasaka 5-chome, Minato-ku, Tokyo 107-8481  

Old name :

 

Original Source :

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