Methods and apparatus for electrochemical-mechanical processing of microelectronic workpieces
A Standard patent application filed on 28 February 2003 credited to Moore, Scott E.
;
Lee, Whonchee
;
Doan, Trung T.
;
Meikle, Scott G.
Details
Application number :
2003212478
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Methods and apparatus for electrochemical-mechanical processing of microelectronic workpieces
Inventor :
Moore, Scott E.
;
Lee, Whonchee
;
Doan, Trung T.
;
Meikle, Scott G.
Agent name :
Address for service :
Filing date :
28 February 2003
Associated companies :
Applicant name :
MICRON TECHNOLOGY, INC.
Applicant address :
P.O. BOX 6, 8000 South Federal Way, Boise, ID 83706-9632