Process for producing group iii nitride compound semiconductor
A Standard patent application filed on 24 February 2003 credited to Ito, Jun
;
Nishijima, Kazuki
;
Hayashi, Toshimasa
;
Shibata, Naoki
;
Chiyo, Toshiaki
;
Senda, Masanobu
Details
Application number :
2003211437
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Process for producing group iii nitride compound semiconductor