Method and system for repairing defected photomasks
A Standard patent application filed on 12 December 2002 credited to Zait, Eitan ; Ben-Zvi, Guy ; Dmitriev, Vladimir J. ; Oshemkov, Sergey V. ; Guletskiy, Nikolay N.

Details

Application number :

2002358960  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method and system for repairing defected photomasks  

Inventor :

Zait, Eitan ; Ben-Zvi, Guy ; Dmitriev, Vladimir J. ; Oshemkov, Sergey V. ; Guletskiy, Nikolay N.  

Agent name :

 

Address for service :

 

Filing date :

12 December 2002  

Associated companies :

 

Applicant name :

U.C.LASER LTD.  

Applicant address :

P.O. Box 351, 21613 Karmiel  

Old name :

 

Original Source :

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