Method for limiting divot formation in post shallow trench isolation processes
A Standard patent application filed on 14 November 2002 credited to Weil, James D. ; Bartlau, Peter H. ; Cantell, Marc W. ; Laskey, Jerome B.

Details

Application number :

2002357717  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method for limiting divot formation in post shallow trench isolation processes  

Inventor :

Weil, James D. ; Bartlau, Peter H. ; Cantell, Marc W. ; Laskey, Jerome B.  

Agent name :

 

Address for service :

 

Filing date :

14 November 2002  

Associated companies :

 

Applicant name :

INTERNATIONAL BUSINESS MACHINES CORPORATION  

Applicant address :

New Orchard Road, Armonk, NY 10504  

Old name :

 

Original Source :

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