Details

Application number :
2002357717  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Method for limiting divot formation in post shallow trench isolation processes  
Inventor :
Weil, James D. ; Bartlau, Peter H. ; Cantell, Marc W. ; Laskey, Jerome B.  
Agent name :
 
Address for service :
 
Filing date :
14 November 2002  
Associated companies :
 
Applicant name :
INTERNATIONAL BUSINESS MACHINES CORPORATION  
Applicant address :
New Orchard Road, Armonk, NY 10504  
Old name :
 
Original Source :
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