Method for limiting divot formation in post shallow trench isolation processes
A Standard patent application filed on 14 November 2002 credited to Weil, James D.
;
Bartlau, Peter H.
;
Cantell, Marc W.
;
Laskey, Jerome B.
Details
Application number :
2002357717
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method for limiting divot formation in post shallow trench isolation processes
Inventor :
Weil, James D.
;
Bartlau, Peter H.
;
Cantell, Marc W.
;
Laskey, Jerome B.