Details
- Application number :
- 2002357591
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Substrate treating method
- Inventor :
- Sasaki, Masaru
;
Sugawara, Takuya
;
Matsuyama, Seiji
- Agent name :
-
- Address for service :
-
- Filing date :
- 16 December 2002
- Associated companies :
-
- Applicant name :
- TOKYO ELECTRON LIMITED
- Applicant address :
- 3-6, Akasaka 5-Chome, Minato-Ku, Tokyo 107-8481
- Old name :
-
- Original Source :
- Go
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