Method of suckingly holding substrate, and suckingly and holdingly carrying machine using the method
A Standard patent application filed on 11 December 2002 credited to Yoshimura, Hiroaki ; Funada, Hideaki

Details

Application number :

2002354464  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method of suckingly holding substrate, and suckingly and holdingly carrying machine using the method  

Inventor :

Yoshimura, Hiroaki ; Funada, Hideaki  

Agent name :

 

Address for service :

 

Filing date :

11 December 2002  

Associated companies :

 

Applicant name :

MITSUBOSHI DIAMOND INDUSTRIAL CO., LTD.  

Applicant address :

12-12, Minamikaneden 2-chome, Suita-shi, Osaka 564-0044  

Old name :

 

Original Source :

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