Method for forming an improved metal silicide contact to a silicon-containing conductive region
A Standard patent application filed on 20 December 2002 credited to Wieczorek, Karsten
;
Kahlert, Volker
;
Horstmann, Manfred
Details
Application number :
2002351407
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method for forming an improved metal silicide contact to a silicon-containing conductive region