Substrate inspecting device, coating/developing device and substrate inspecting method
A Standard patent application filed on 13 November 2002 credited to Kiyota, Makoto ; Aiuchi, Takashi ; Uemura, Ryouichi ; Tanaka, Michio

Details

Application number :

2002349771  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Substrate inspecting device, coating/developing device and substrate inspecting method  

Inventor :

Kiyota, Makoto ; Aiuchi, Takashi ; Uemura, Ryouichi ; Tanaka, Michio  

Agent name :

 

Address for service :

 

Filing date :

13 November 2002  

Associated companies :

 

Applicant name :

TOKYO ELECTRON LIMITED  

Applicant address :

3-6, Akasaka 5-chome, Minato-ku, Tokyo 107-8481  

Old name :

 

Original Source :

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