Method of introducing nitrogen into semiconductor dielectric layers
A Standard patent application filed on 20 December 2002 credited to Dachs, Charles J. J.
;
Venezia, Vincent C.
;
Schmitz, Jurriaan
;
Cubaynes, Florence N.
Details
Application number :
2002347561
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method of introducing nitrogen into semiconductor dielectric layers
Inventor :
Dachs, Charles J. J.
;
Venezia, Vincent C.
;
Schmitz, Jurriaan
;
Cubaynes, Florence N.