Process for optically erasing charge buildup during fabrication of an integrated circuit
A Standard patent application filed on 02 December 2002 credited to Janos, Alan ; Stewart, Kevin ; Berry, Ivan ; Sinnott, Anthony

Details

Application number :

2002346599  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Process for optically erasing charge buildup during fabrication of an integrated circuit  

Inventor :

Janos, Alan ; Stewart, Kevin ; Berry, Ivan ; Sinnott, Anthony  

Agent name :

 

Address for service :

 

Filing date :

02 December 2002  

Associated companies :

 

Applicant name :

AXCELIS TECHNOLOGIES, INC.  

Applicant address :

55 Cherry Hill Drive, Beverly, MA 01915-1053  

Old name :

 

Original Source :

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