Wafer processing apparatus and transfer device adjustment system
A Standard patent application filed on 09 July 2002 credited to Suzuki, Akihito ; Kamamoto, Hirotsugu ; Imafu, Takashi ; Yonemura, Shuichi ; Aiuchi, Takashi ; Sakamoto, Kazuhisa

Details

Application number :

2002346311  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Wafer processing apparatus and transfer device adjustment system  

Inventor :

Suzuki, Akihito ; Kamamoto, Hirotsugu ; Imafu, Takashi ; Yonemura, Shuichi ; Aiuchi, Takashi ; Sakamoto, Kazuhisa  

Agent name :

 

Address for service :

 

Filing date :

09 July 2002  

Associated companies :

 

Applicant name :

TOKYO ELECTRON LIMITED  

Applicant address :

3-6, Akasaka 5-chome, Minato-ku, Tokyo 107-8481  

Old name :

 

Original Source :

Go  

Same Inventor

• Substrate processing apparatus