Details
- Application number :
- 2002344313
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Plasma etching of silicon carbide
- Inventor :
- Li, Si Yi
- Agent name :
-
- Address for service :
-
- Filing date :
- 21 March 2002
- Associated companies :
-
- Applicant name :
- LAM RESEARCH CORPORATION
- Applicant address :
- 4650 Cushing Parkway, Fremont, CA 94538
- Old name :
-
- Original Source :
- Go