Wafer support attachment for a semi-conductor wafer transport container
A Standard patent application filed on 13 November 2002 credited to Eggum, Shawn D.

Details

Application number :

2002343684  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Wafer support attachment for a semi-conductor wafer transport container  

Inventor :

Eggum, Shawn D.  

Agent name :

 

Address for service :

 

Filing date :

13 November 2002  

Associated companies :

 

Applicant name :

ENTEGRIS, INC.  

Applicant address :

3500 Lyman Boulevard, Chaska, MN 55318  

Old name :

 

Original Source :

Go  

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