Protective shield and system for gas distribution
A Standard patent application filed on 26 August 2002 credited to Mattson, Colby ; Hakimelahy, Iraj ; Yuh, Soon K. ; Park, Seung Gyun ; Bartholomew, Lawrence D.

Details

Application number :

2002336403  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Protective shield and system for gas distribution  

Inventor :

Mattson, Colby ; Hakimelahy, Iraj ; Yuh, Soon K. ; Park, Seung Gyun ; Bartholomew, Lawrence D.  

Agent name :

 

Address for service :

 

Filing date :

26 August 2002  

Associated companies :

 

Applicant name :

ASML US, INC.  

Applicant address :

440 Kings Village Road, Scotts Valley, CA 95066-4081  

Old name :

 

Original Source :

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