Method and device for producing layer systems for optical precision elements
A Standard patent application filed on 26 August 2002 credited to Liebig, Jorn-Steffen ; Kirchhoff, Volker ; Winkler, Torsten ; Goedicke, Klaus

Details

Application number :

2002333710  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method and device for producing layer systems for optical precision elements  

Inventor :

Liebig, Jorn-Steffen ; Kirchhoff, Volker ; Winkler, Torsten ; Goedicke, Klaus  

Agent name :

 

Address for service :

 

Filing date :

26 August 2002  

Associated companies :

 

Applicant name :

FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E. V.  

Applicant address :

Leonrodstrasse 54, 80636 Munchen  

Old name :

 

Original Source :

Go  

Same Inventor

• Device and method for coating substrates