Method of and apparatus for substrate pre-treatment
A Standard patent application filed on 04 June 2002 credited to Henderson, Clifford
;
Maloney, David J.
;
Fury, Michael A.
;
Lee, Wai M.
;
Hill, Ross H.
;
Barstow, Sean
;
Roman, Paul J.
Details
Application number :
2002314897
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method of and apparatus for substrate pre-treatment
Inventor :
Henderson, Clifford
;
Maloney, David J.
;
Fury, Michael A.
;
Lee, Wai M.
;
Hill, Ross H.
;
Barstow, Sean
;
Roman, Paul J.
Agent name :
Address for service :
Filing date :
04 June 2002
Associated companies :
Applicant name :
GEORGIA TECH RESEARCH CORPORATION
Applicant address :
Centennial Research Building, Georgia Institute of Technology, Atlanta, GA 30332-0420