Dual damascene multi-level metallization
A Standard patent application filed on 14 May 2002 credited to Correale, Anthony Jr.
;
Agarwala, Birendra N.
;
Sullivan, Timothy D.
;
Rathore, Hazara S.
;
Coker, Eric M.
Details
Application number :
2002314065
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Dual damascene multi-level metallization
Inventor :
Correale, Anthony Jr.
;
Agarwala, Birendra N.
;
Sullivan, Timothy D.
;
Rathore, Hazara S.
;
Coker, Eric M.