Details

Application number :
2002306892  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Method and device for vibration control  
Inventor :
Pletner, Baruch ; Dorn, Huckleberry B. ; Perkins, Richard ; Karpel, Mordechay ; Lublin, Leonard  
Agent name :
 
Address for service :
 
Filing date :
25 March 2002  
Associated companies :
 
Applicant name :
CYMER, INC.  
Applicant address :
16750 Via Del Campo Court, San Diego, CA 92127-1712  
Old name :
 
Original Source :
Go  

Related Patents