Details

Application number :
22441  
Application type :
Standard  
Application status :
SEALED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Method and apparatus for manufacturing semiconductor device  
Inventor :
Nishio, Hitoshi ; Kondo, Masataka ; Yamagishi, Hideo  
Agent name :
Davies Collison Cave  
Address for service :
Level 15 1 Nicholson Street MELBOURNE VIC 3000  
Filing date :
21 March 2000  
Associated companies :
 
Applicant name :
Kaneka Corporation  
Applicant address :
2-4 Nakanoshima 3-chome Kita-ku Osaka-shi Osaka 530-8288 Japan  
Old name :
 
Original Source :
Go  

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