Ultrashort pulse laser ablation appartus and method using it to form reticles
A Standard patent application filed on 23 May 2002 credited to Zait, Eitan ; Dmitriev, Vladimir ; Oshemkov, Sergei ; Guletsky, Nikolay

Details

Application number :

2002304274  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Ultrashort pulse laser ablation appartus and method using it to form reticles  

Inventor :

Zait, Eitan ; Dmitriev, Vladimir ; Oshemkov, Sergei ; Guletsky, Nikolay  

Agent name :

 

Address for service :

 

Filing date :

23 May 2002  

Associated companies :

 

Applicant name :

U.C.LASER LTD.  

Applicant address :

P.O.Box 351, 21613 Karmiel  

Old name :

 

Original Source :

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