Method of etching shaped cavities and associated on-chip devices and micro-machined structures
A Standard patent application filed on 03 April 2002 credited to Hua, Yaping ; Zhao, Yang

Details

Application number :

2002257107  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method of etching shaped cavities and associated on-chip devices and micro-machined structures  

Inventor :

Hua, Yaping ; Zhao, Yang  

Agent name :

 

Address for service :

 

Filing date :

03 April 2002  

Associated companies :

 

Applicant name :

MEMSIC, INC.  

Applicant address :

800 Turnpike Street, Suite 202 North Andover, MA 01845 United States of America  

Old name :

 

Original Source :

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