Apparatus and method for controlling the voltage applied to an electrostatic shield used in a plasma generator

Application number :: 2002250509
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Apparatus and method for controlling the voltage applied to an electrostatic shield used in a plasma generator
Inventor :: Benjamin, Neil ; Kuthi, Andras
Agent name :
Address for service :
Filing date :: 02 April 2002
Associated companies :
Applicant name :: LAM RESEARCH, CORPORATION
Applicant address :: 4650 Cushing Parkway, Fremont, CA 94538
Old name :
Original Source :: Go

Apparatus and method for controlling the voltage applied to an electrostatic shield used in a plasma generator A Standard patent application filed on 02 April 2002 credited to Benjamin, Neil ; Kuthi, Andras