Halogenated anti-reflective coatings
A Standard patent application filed on 11 February 2002 credited to Mizusawa, Ken-Ichi ; Enomoto, Tomoyuki ; Arase, Shin-Ya ; Puligadda, Rama

Details

Application number :

2002245460  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Halogenated anti-reflective coatings  

Inventor :

Mizusawa, Ken-Ichi ; Enomoto, Tomoyuki ; Arase, Shin-Ya ; Puligadda, Rama  

Agent name :

 

Address for service :

 

Filing date :

11 February 2002  

Associated companies :

 

Applicant name :

BREWER SCIENCE, INC.  

Applicant address :

2401 Brewer Drive, Rolla, MO 65401-9926  

Old name :

 

Original Source :

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