Ultraviolet laser ablative patterning of microstructures in semiconductors
A Standard patent application filed on 10 January 2002 credited to Baird, Brian W.
;
Fahey, Kevin P.
;
Mcneil, Thomas R.
;
Wolfe, Michael J.
;
Harris, Richard J.
;
Zou, Lian-Cheng
Details
Application number :
2002241858
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Ultraviolet laser ablative patterning of microstructures in semiconductors
Inventor :
Baird, Brian W.
;
Fahey, Kevin P.
;
Mcneil, Thomas R.
;
Wolfe, Michael J.
;
Harris, Richard J.
;
Zou, Lian-Cheng
Agent name :
Address for service :
Filing date :
10 January 2002
Associated companies :
Applicant name :
ELECTRO SCIENTIFIC INDUSTRIES, INC.
Applicant address :
13900 N.W. Science Park Drive, Portland, OR 97229-5497