Fabrication of high resistivity structures using focused ion beams
A Standard patent application filed on 25 January 2002 credited to Mai, Tung ; Bassom, Neil J.

Details

Application number :

2002240060  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Fabrication of high resistivity structures using focused ion beams  

Inventor :

Mai, Tung ; Bassom, Neil J.  

Agent name :

 

Address for service :

 

Filing date :

25 January 2002  

Associated companies :

 

Applicant name :

FEI COMPANY  

Applicant address :

7451 NW Evergreen Parkway, Hillsboro, OR 97124-5830  

Old name :

 

Original Source :

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