Protective overcoat for replicated diffraction gratings
A Standard patent application filed on 07 November 2001 credited to Ershov, Alexander I. ; Pan, Xiaojiang J. ; Morton, Richard G.

Details

Application number :
2002239525  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Protective overcoat for replicated diffraction gratings  
Inventor :
Ershov, Alexander I. ; Pan, Xiaojiang J. ; Morton, Richard G.  
Agent name :
 
Address for service :
 
Filing date :
07 November 2001  
Associated companies :
 
Applicant name :
Cymer, Inc.  
Applicant address :
 
Old name :
 
Original Source :
Go  

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